Computational-lithography

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Computational-lithography

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This is a 2D expansion of the pierremifasol's work(https://github.com/pierremifasol/Lithography-Simulation)

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# Computational-lithography
This code is a python code with jupyter-lab environment. You can just copy and paste my code to run it, however, using jupyter-lab is recommended.

This is a 2D version of pierremifasol's work(https://github.com/pierremifasol/Lithography-Simulation) about computational lithography.

Dependencies

numpy
matplotlib
scikit-fmm
ipywidgets
scipy
IPython

File description

0. README.md: 
    This file.

1. Lithography Simulation_2D.ipynb : 
    2D version of pierremifasol's code. Only Abbe's formula is implemented. I will update Hopkins' formula further and development process.
    At this code, there are 3 kind of mask(reticle), a hole, L shape and L shape with OPC.
    
    you can easily overview with below link.
    https://nbviewer.org/github/lani5677/Computational-lithography/blob/main/Lithography%20Simulation_2D.ipynb

2. Lithography Simulation with python.ipynb : 
    same code with pierremifasol's code "Lithography I - Basics"

3. Aberration and Defocus.ipynb : 
    same code with pierremifasol's code"Lithography II - Aberrations and Defocus."

Computational-lithography

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